|
|
Volumn 4066, Issue , 2000, Pages 537-542
|
|
End of thresholds: subwavelength optical linewidth measurement using the Flux-Area technique
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
IMAGE ANALYSIS;
IMAGE QUALITY;
LIGHT ABSORPTION;
OPACITY;
OPTICAL RESOLVING POWER;
OPTICAL TESTING;
OPTICAL VARIABLES MEASUREMENT;
PHOTOLITHOGRAPHY;
SCANNING ELECTRON MICROSCOPY;
ULTRAVIOLET RADIATION;
FLUX AREA TECHNIQUE;
MASK INSPECTION;
PHOTOMASK;
SUBWAVELENGTH OPTICAL LINEWIDTH MEASUREMENT;
MASKS;
|
|
EID: 0033675343
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.392075 Document Type: Conference Paper |
|
Times cited : (1)
|
|
References (2)
|
