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Volumn 34, Issue 6, 2000, Pages 394-397
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Non-steady-state combined process of etching and imidization of polyamidoacid film in nonequilibrium oxygen plasma
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Author keywords
[No Author keywords available]
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Indexed keywords
DIAMINODIPHENYL OXIDE;
OXYGEN;
POLYAMIDOACID;
POLYMER;
PYROMELLITIC DIANHYDRIDE;
UNCLASSIFIED DRUG;
ARTICLE;
CHEMICAL ANALYSIS;
CHEMICAL REACTION KINETICS;
CONCENTRATION RESPONSE;
FILM;
KINETICS;
PARAMETER;
POSITIVE FEEDBACK;
PRESSURE;
RADIOFREQUENCY;
REACTION ANALYSIS;
SPECTROSCOPY;
THICKNESS;
TIME;
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EID: 0033672757
PISSN: 00181439
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1026682709248 Document Type: Article |
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Times cited : (1)
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References (10)
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