CAR blanks feasibility study results

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4066, Issue , 2000, Pages 269-280

  Yokoya, Yasunori ^a   Kobayashi, Hideo ^a   Hashimoto, Masahiro ^a   Ohta, Fumiko ^a   Asakawa, Keishi ^a  

^a HOYA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM COMPOUNDS; COATINGS; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; INTEGRATED CIRCUIT MANUFACTURE; MASKS; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS; THIN FILMS;

CHEMICALLY AMPLIFIED RESISTS; ELECTRON BEAM RETICLE FABRICATION; POST COATING DELAY; POST EXPOSURE DELAY; POST SPIN BAKING;

PHOTORESISTS;

EID: 0033671249     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.392064     Document Type: Conference Paper

References (4)