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Volumn 39, Issue 5, 2000, Pages 567-570

Analysis of sub-boil distilled water, hydrochloric and nitric acid for trace element impurities by ICP-MS

Author keywords

[No Author keywords available]

Indexed keywords

HYDROCHLORIC ACID; LEAD; POLYETHYLENE; REAGENT; TRACE ELEMENT; WATER;

EID: 0033668947     PISSN: 03764710     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (4)

References (7)
  • 5
    • 0006890286 scopus 로고    scopus 로고
    • Semiconductor Equipment Manufacturers Institute (SEMI) Specification for reagents CI STD 21-85


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.