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Volumn 154, Issue 1, 2000, Pages 157-161
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A thermodynamic estimation of the chemical vapor deposition of some borides
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Author keywords
Borides; Boron halides; Boron hydrides; Chemical vapor deposition; Thermodynamic estimation
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Indexed keywords
BORON DERIVATIVE;
HALIDE;
ARTICLE;
CHEMICAL STRUCTURE;
MATHEMATICAL ANALYSIS;
REACTION ANALYSIS;
TECHNOLOGY;
THERMODYNAMICS;
VAPOR;
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EID: 0033662475
PISSN: 00224596
EISSN: None
Source Type: Journal
DOI: 10.1006/jssc.2000.8828 Document Type: Article |
Times cited : (20)
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References (18)
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