Evaluation of fused silica for DUV laser applications by short time diagnostics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4103, Issue , 2000, Pages 1-11

  Triebel, W ^a   Bark Zollmann, S ^a   Muehlig, C ^a   Voitsch, A ^a   Coriand, F ^a   Alkemper, J ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE; FUSED SILICA; LASER APPLICATIONS; LASER DAMAGE; LASER PULSES; LIGHT ABSORPTION; MASKS; OPTICAL GLASS; PHOTOLITHOGRAPHY; RADIATION DAMAGE; RAMAN SPECTROSCOPY; ULTRAVIOLET RADIATION;

LASER INDUCED DEFLECTION (LID); LASER INDUCED FLUORESCENCE (LIF);

EXCIMER LASERS;

EID: 0033661377     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)