Development of a novel micromachined magnetostatic membrane actuator

Annual Device Research Conference Digest

Volumn , Issue , 2000, Pages 109-110

  Khoo, Melvin ^a   Liu, Chang ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DESIGN; ELASTOMERS; FABRICATION; FERROMAGNETIC MATERIALS; FINITE ELEMENT METHOD; MAGNETIC FIELD EFFECTS; MAGNETOSTATICS; NICKEL ALLOYS; OPTIMIZATION; POLYMERIC MEMBRANES; SILICONES;

MAGNETIC ACTUATION; MAGNETOSTATIC MEMBRANE ACTUATOR; PERMALLOY; POLYDIMETHYL SILOXANE; SILICONE ELASTOMER MEMBRANE;

MICROACTUATORS;

EID: 0033659231     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)