Analysis of thin PZT films as a function of depth and thickness by GIXS

Integrated Ferroelectrics

Volumn 29, Issue 1-2, 2000, Pages 127-141

  Petit, M ^a   Nagarajan, V ^a   Aggarwal, S ^a   Ramesh, R ^a   Martinez Miranda, L J ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Depth analysis; Epitaxial ferroelectric films; Grazing incidence X ray scattering; In plane strain

Indexed keywords

EXCIMER LASERS; LANTHANUM COMPOUNDS; LATTICE CONSTANTS; MAPPING; PULSED LASER APPLICATIONS; SEMICONDUCTING LEAD COMPOUNDS; STRAIN; X RAY SCATTERING;

DEPTH ANALYSIS; EPITAXIAL FERROELECTRIC FILMS; FILM STRUCTURE; GRAZING INCIDENCE X RAY SCATTERING; LEAD ZIRCONATE TITANATE;

THIN FILMS;

EID: 0033653048     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584580008216680     Document Type: Article

References (4)

1. S. Aggarwal, R. Ramesh, unpublished data.
2. M.E. Lines, A.M. Glass, Principles and Applications of Ferroelectrics and Related Materials, edited by W. Marshall & D.H. Wilkinson (Oxford, Clarendon, 1977).
3. M.F. Toney, T.C. Huang. S. Brennan, Z. Rek, J. Mater. Res. 3, 351 (1988).
4. Web page 〈http://sergey.bio.aps.anl.gov/cgi/X0h.... 〉, data extracted for E = 10keV.