Nano-oxidation of semiconductor heterostructures with atomic force microscopes: Technology and applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4098, Issue , 2000, Pages 52-64

  Heinzel, Thomas ^a   Luscher, Silvia ^a   Fuhrer, Andreas ^a   Salis, Gian ^a   Held, Ryan ^a   Ensslin, Klaus ^a   Wegscheider, Werner ^a   Bichler, Max ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON GAS; ELECTRON TRANSPORT PROPERTIES; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OXIDATION; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR QUANTUM WIRES;

SCANNING PROBE MICROSCOPY; SEMICONDUCTING NANOSTRUCTURES;

HETEROJUNCTIONS;

EID: 0033644969     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.401643     Document Type: Conference Paper

References (65)