AlxGa1-xAs semiconductor sensor for contact pressure measurement

Sensors and Actuators, A: Physical

Volumn 79, Issue 1, 2000, Pages 31-35

  Toh, Siew Lok ^a   Tay, Cho Jui ^a   Ng, Sum Huan ^a   Rahman, Mustafizur ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CREEP TESTING; PRESSURE MEASUREMENT; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING FILMS;

ALUMINUM GALLIUM ARSENIDE; SEMICONDUCTOR SENSOR;

SENSORS;

EID: 0033639664     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00272-6     Document Type: Article

References (10)

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