The next generation of deposition equipment for wear protection coatings

Surface and Coatings Technology

Volumn 114, Issue 1, 1999, Pages 101-107

  Bergmann, E ^a   Van Der Kolk, G I ^b   Buil, B ^b   Hurkmans, T ^b  

^a 4 Rte de la Prairie 1202 ^*  (Switzerland)

^b Hauzer Techno Coating BV   (Netherlands)

Author keywords

Deposition equipment; Equipment design; Protection coatings; PVD; Wear

Indexed keywords

CHEMICAL EQUIPMENT; DESIGN; IONIZATION; PLASMA DENSITY; SUBSTRATES; VAPOR DEPOSITION; WEAR OF MATERIALS;

DEPOSITION EQUIPMENT; PHYSICAL VAPOR DEPOSITION;

PROTECTIVE COATINGS;

EQUIPMENT; VAPOR DEPOSITION; WEAR PREVENTION;

EID: 0033590889     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00016-X     Document Type: Article

References (10)

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2. W. Kaltbrunner, S. Weinberger, personal communication.
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4. ASU Composants SA product description ASU 500. 1983.
5. Matthews A. Vacuum. 32:1982;311.
6. Matthews A., Gethin D.T. Thin Solid Films. 17:1984;261.
7. Bergmann E. Le vide, les couches minces. 297:1996;1.
8. Boxman R., Zhitomirsky V., Alterkop B., Gidalevich E., Beilis I., Keidar M., Goldsmith S. Surf. Coat. Technol. 86/87:1996;243.
9. R. Welty, personal communication.
10. E. Bergmann, pending patent applications.