Multi-structure ion sensitive field effect transistor with a metal light shield

Sensors and Actuators, B: Chemical

Volumn 61, Issue 1, 1999, Pages 1-5

  Liao, Hung Kwei ^a   Wu, Chung Lin ^a   Chou, Jung Chuan ^b   Chung, Wen Yaw ^a   Sun, Tai Ping ^c   Hsiung, Shen Kan ^a  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

^b NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c Chungyu Institute of Technology   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ION SENSITIVE FIELD EFFECT TRANSISTORS; PH EFFECTS; PHOTOSENSITIVITY; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTING TIN COMPOUNDS; SEMICONDUCTOR DEVICE STRUCTURES; SILICA; SILICON NITRIDE;

LIGHT SHIELD; SEMICONDUCTOR SENSORS; TIN DIOXIDE;

SENSORS;

EID: 0033554785     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00036-2     Document Type: Article

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