Magnetic multipole confinement used in amorphous hydrogenated carbon films deposition

Journal of Non-Crystalline Solids

Volumn 249, Issue 2-3, 1999, Pages 180-188

  Tomozeiu, N ^a   Milne, W I ^b  

^a UNIVERSITY OF BUCHAREST   (Romania)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY LOSS SPECTROSCOPY; HYDROCARBONS; INFRARED SPECTROSCOPY; LIGHT ABSORPTION; MAGNETIC FIELDS; OPTICAL PROPERTIES; PLASMA CONFINEMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX;

INFRARED ABSORPTION; MAGNETIC MULTIPOLE CONFINEMENT;

AMORPHOUS FILMS;

EID: 0033516355     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(99)00318-X     Document Type: Article

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