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Volumn 198-199, Issue pt 2, 1999, Pages 1111-1118

In situ monitoring of arsenic desorption on GaAs (1 1 1)B surface in atomic layer epitaxy

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; DESORPTION; SEMICONDUCTING GALLIUM ARSENIDE; SURFACE STRUCTURE;

ATOMIC LAYER EPITAXY; GRAVIMETRIC MONITORING; SURFACE RECONSTRUCTION;

EPITAXIAL GROWTH;

EID: 0033514567 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(98)01126-9 Document Type: Article

Times cited : (5)

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