Light emission from ion beam induced silicon nanoclusters in silicon dioxide: Role of cluster-cluster interactions via a thin oxide

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 980-985

  Shimizu Iwayama, Tsutomu ^a   Hole, David E ^b   Townsend, Peter D ^b  

^a AICHI UNIVERSITY OF EDUCATION   (Japan)

^b UNIVERSITY OF SUSSEX   (United Kingdom)

Author keywords

Ion implantation; Luminescence; Nanocluster; Nanocrystal; Silicon

Indexed keywords

ANNEALING; ION IMPLANTATION; LUMINESCENCE OF SOLIDS; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; SILICA;

SILICON NANOCLUSTERS;

SEMICONDUCTING SILICON;

EID: 0033513828     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00775-7     Document Type: Article

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