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Volumn 130, Issue 1, 1999, Pages 79-87

Preparation and characterization of epitaxial CaSi2 and siloxene layers on silicon

Author keywords

Anisotropy of IR absorption; CaSi2 epitaxy; Diode structure; Structural analysis

Indexed keywords


EID: 0033479412     PISSN: 00269247     EISSN: None     Source Type: Journal    
DOI: 10.1007/PL00010177     Document Type: Article
Times cited : (11)

References (19)
  • 7
    • 0039734184 scopus 로고
    • Epitaxial silicides
    • Mahajan S (ed) Elsevier, Amsterdam
    • Tung RT (1994) Epitaxial Silicides. In: Mahajan S (ed) Handbook on Semiconductors, vol 3. Elsevier, Amsterdam
    • (1994) Handbook on Semiconductors , vol.3
    • Tung, R.T.1
  • 9
    • 0000112472 scopus 로고
    • Formation and characterization of transition metal silicides
    • Einspruch NG (ed). Academic Press, New York
    • Nicolet MA, Lau SS (1983) Formation and Characterization of Transition Metal Silicides. In: Einspruch NG (ed) VLSI Electronics, vol 6. Academic Press, New York
    • (1983) VLSI Electronics , vol.6
    • Nicolet, M.A.1    Lau, S.S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.