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Volumn 130, Issue 1, 1999, Pages 79-87
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Preparation and characterization of epitaxial CaSi2 and siloxene layers on silicon
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Author keywords
Anisotropy of IR absorption; CaSi2 epitaxy; Diode structure; Structural analysis
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Indexed keywords
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EID: 0033479412
PISSN: 00269247
EISSN: None
Source Type: Journal
DOI: 10.1007/PL00010177 Document Type: Article |
Times cited : (11)
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References (19)
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