Clean aluminum oxide formation on surface of aluminum cylinder an ultraclean gas-sampling system

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 3139-3143

  Ishihara, Yoshio ^a   Itou, Noriko ^a   Kimijima, Tetsuya ^a   Hirano, Takashi ^a  

^a TAIYO NIPPON SANSO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033471074     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582018     Document Type: Article

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