Measuring the magnetic field distribution of a magnetron sputtering target

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 3118-3120

  Santos, Edval J P ^a  

^a FEDERAL UNIVERSITY OF PERNAMBUCO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033456563     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582013     Document Type: Article

References (7)

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