A phase-sensitive technique for the thermal characterization of dielectric thin films

Journal of Heat Transfer

Volumn 121, Issue 3, 1999, Pages 528-536

  Indermuehle, S W ^a   Peterson, R B ^a  

^a Oregon State University   (United States)

Author keywords

Heat transfer; Measurement techniques; Periodic; Properties; Thin films

Indexed keywords

DIELECTRIC FILMS; GROWTH (MATERIALS); MATHEMATICAL MODELS; SPECIFIC HEAT OF SOLIDS; THIN FILMS;

TEMPERATURE RESPONSE;

HEAT CONDUCTION;

FILM; MICROELECTRONICS; THERMAL ANALYSIS; THERMAL DIFFUSION;

EID: 0033452168     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2826013     Document Type: Article

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