Characterization of Pb(Zr,Ti)O3 thin films prepared by metal-organic chemical-vapor deposition using a solid delivery system

Journal of the Korean Physical Society

Volumn 35, Issue SUPPL. 2, 1999, Pages

  Shin, Ju Cheol ^a   Hong, Eun Ki ^a   Hwang, Cheol Seong ^a   Kim, Hyeong Joon ^a   Lee, Jong Myeong ^b  

^a Seoul National University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033441271     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

1. G. H. Haertling, J. Vac. Sci. Technol. A9, 414 (1991).
2. R. Hiskes, S. A. Dicarolis, J. L. Young, S. S. Laderman, R. D. Jacowitz and R. C. Taber, Appl. Phys. Lett. 59, 606 (1991).
3. J. F. Scott, C. A. Paz de Araujo, B. M. Melnick, L. D. McMillian and R. Zuleeg, J. Appl. Phys. 70, 382 (1994).
4. X. Chen, A. I. Kingon, L. Mantese, O. Auciello and K. Y. Hsich, Integr. Ferroelectrics 3, 259 (1993).
5. M. Okada, K. Tominaga, T. Araki, S. Katayama and Y. Sakashita, Jpn. J. Appl. Phys. 29, 718 (1990).
6. M. De Keijser, P. J. Van Veldhoven and G. J. M. Dormans, Mat. Res. Soc. Symp. Proc. 310, 223 (1993).
7. W. Schottky, Z. Phys. 15, 872 (1914).