How ion-beam etching the surface of optical articles affects the chemical composition of optical materials

Journal of Optical Technology (A Translation of Opticheskii Zhurnal)

Volumn 66, Issue 12, 1999, Pages 1029-1031

  Mikhnev, R A ^a   Shtandel', S K ^a   Martynov, M I ^b   Elesin, L A ^b  

^a JSC Lytkarino Optical Glass Plant   (Russian Federation)

^b KURCHATOV INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; ETCHING; ION BEAMS; PARTICLE OPTICS;

ION BEAM ETCHING (IBE);

OPTICAL MATERIALS;

EID: 0033438933     PISSN: 10709762     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOT.66.001029     Document Type: Article

References (18)

1. G. F. Ivanovskiǐ and V. I. Petrov, Ion-Plasma Processing of Materials (Radio i Svyaz', Moscow, 1986).
2. A. V. Perveev, L. V. Vishnevskaya, and L. A. Cherezova, Ion-Beam Etching of Optical Materials and Coatings (NTTs Informtekhnika, Moscow, 1990).
3. M. I. Martynov, R. A. Mikhnev, A. P. Semënov, and S. K. Shtandel', "The technology and metrology of the ion-beam microprocessing of optical articles," Opt. Zh. 64, No. 8, 66 (1997) [J. Opt. Technol. 64, 755 (1997)].
4. M. I. Martynov, R. A. Mikhnev, A. P. Semënov, and S. K. Shtandel', "The technology and metrology of the ion-beam microprocessing of optical articles," Opt. Zh. 64, No. 8, 66 (1997) [J. Opt. Technol. 64, 755 (1997)].
5. L. I. Dëmkina, Physical and Chemical Principles of the Production of Optical Glass (Khimiya, Moscow, 1976).
6. N. M. Pavlushkin, Chemical Technology of Glass and Glass-Ceramics (Stroǐizdat, Moscow, 1983).
7. GOST [State Standard] 3514-76, "Colorless optical glass. Technical conditions," (Gosstandart, Moscow, 1976).
8. GOST 13659-78, "Colorless optical glass. Physical and chemical characteristics," (Gosstandart, Moscow, 1978).
9. GOST 23136-78, "Optical materials. Parameters," (Gosstandart, Moscow, 1978).
10. L. I. Dëmkina, Calculating the Optical Constants of Silicate Glass (Oborongiz, Moscow, 1958).
11. A. A. Apen, Chemistry of Glass (Khimiya, Moscow, 1970).
12. Trudy Gos. Opt. Inst. 39, No. 170 (1972).
13. OST [Industry Standard] 3-4888-80, "Colorless optical glass. Synthetic composition," (Minoboronprom, Moscow, 1980).
14. OST 3-104-77, "SO115M glass-ceramic. Synthetic composition," (Minoboronprom, Moscow, 1977).
15. L. S. Lomonosova and O. B. Fal'kova, Spectral Analysis (Gosnauchtekhizdat, Moscow, 1958).
16. J. I. Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis (Plenum Press, New York, 1981; Mir, Moscow, 1984).
17. B. V. Nekrasov, Textbook of General Chemistry (Khimiya, Moscow, 1981).
18. OST 3-5386-83, "Optical glass. Method of calculating the correction of the synthetic composition," (Minoboronprom, Moscow, 1983).