Novel reflectron time of flight analyzer for surface analysis using secondary ion mass spectroscopy and mass spectroscopy of recoiled ions

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2634-2641

  Smentkowski, V S ^a,c   Krauss, A R ^a   Gruen, D M ^a   Holecek, J C ^b   Schultz, J A ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b Ionwerks   (United States)

^c GE GLOBAL RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033424577     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581923     Document Type: Article

References (31)

1. A. R. Krauss, Y. Lin, O. Auciello, G. J. Lamich, D. M. Gruen, J. A. Schultz, and R. P. H. Chang, J. Vac. Sci. Technol. A 12, 1943 (1994).
2. Y. Lin, A. R. Krauss, O. Auciello, Y. Nishino, D. M. Gruen, R. P. H. Chang, and J. A. Schultz, J. Vac. Sci. Technol. A 12, 1557 (1994).
3. A. R. Krauss, O. Auciello, and J. A. Schultz, MRS Bull. 20, 18 (1995).
4. M. S. Hammond, J. A. Schultz, and A. R. Krauss, J. Vac. Sci. Technol. A 13, 1136 (1995).
5. J. Im, A. R. Krauss, Y. Lin, J. A. Schultz, O. H. Auciello, D. M. Gruen, and R. P. H. Chang, Nucl. Instrum. Methods Phys. Res. B 118, 772 (1996).
6. T. M. Buck, in Methods of Surface Analysis, edited by A. W. Czanderna (Elsevier, Amsterdam, 1975), pp. 75-100.
7. D. P. Woodruff and T. A. Delchar, Modern Techniques of Surface Science, 2nd ed. (Cambridge University Press, Cambridge, 1994), pp. 266-338.
8. W. K. Chu, J. W. Mayer, and M. A. Nicolet, Backscattering Spectrometry (Academic, New York, 1978).
9. J. W. Rabalais, Science 250, 521 (1990); Crit. Rev. Solid State Mater. Sci. 14, 319 (1988).
10. J. W. Rabalais, Science 250, 521 (1990); Crit. Rev. Solid State Mater. Sci. 14, 319 (1988).
11. Y. S. Chen, G. L. Miller, D. A. H. Robinson, G. H. Wheatley, and T. M. Buck, Surf. Sci. 62, 133 (1977).
12. S. B. Luitjens, A. J. Algra, E. P. Th. M. Suurmeijer, and A. L. Boers, Appl. Phys. 21, 205 (1980).
13. K. Waters, A. Bensaoula, A. Schultz, K. Eipers-Smith, and A. Freundlich, J. Cryst. Growth 127, 972 (1993).
14. K. Eipers-Smith, K. Waters, and J. A. Schultz, J. Am. Ceram. Soc. 76, 284 (1993).
15. Handbook of Static Secondary Ion Mass Spectrometry (SIMS), edited by D. Briggs, A. Brown, and J. C. Vickerman (Wiley, New York, 1989).
16. J. A. McHugh, in Methods of Surface Analysis, edited by A. W. Czanderna (Elsevier, Amsterdam, 1975), pp. 223-273.
17. A. Benninghoven, Z. Phys. 230, 403 (1970).
18. E. Niehuis, T. Heller, H. Feld, and A. Benninghoven, J. Vac. Sci. Tech nol. A 5, 1243 (1987).
19. A. Benninghoven, Surf. Sci. 299/300, 246 (1994).
20. A. Benninghoven, Phys. Status Solidi 34, K169 (1969).
21. P. Steffens, E. Niehuis, T. Friese, D. Greifendorf, and A. Benninghoven, J. Vac. Sci. Technol. A 3, 1322 (1985).
22. D. P. Woodruff and T. A. Delchar, in Ref. 7, pp. 338-355.
23. P. Sigmund, in Sputtering by Particle Bombardment I, Springer Series Topics in Applied Physics Vol. 47, edited by R. Behrisch (Springer, Berlin, 1981), p. 27.
24. V. S. Smentkowski, J. C. Holecek, J. A. Schultz, A. R. Krauss, and D. M. Gruen, J. Vac. Sci. Technol. A 16, 1779 (1998).
25. The Merck Index, 10th ed., edited by M. Windholz, S. Budavari, R. F. Blumetti, and E. S. Otterbein (Merck and Co., Rahway, NJ, 1983), p. 4267.
26. V. S. Smentkowski, J. C. Holecek, J. A. Schultz, and A. R. Krauss (unpublished results).
27. H. A. Storms, K. F. Brown, and J. D. Stein, Anal. Chem. 49, 2023 (1977).
28. A. R. Krauss and V. Krohn, Mass Spectrometry, A Specialist Periodical Report, Chem. Soc. (London) 6, 118 (1980).
29. J. A. Schultz (unpublished results).
30. V. S. Smentkowski, J. C. Holecek, J. A. Schultz, A. R. Krauss, and D. M. Gruen, in Secondary Ion Mass Spectrometry, SIMS XI, edited by G. Gillen, R. Lareau, J. Bennett, and F. Stevie (Wiley, New York, 1997), pp. 1083-1086.
31. A. R. Krauss, J. Im, V. Smentkowski, J. A. Schultz, O. Auciello, D. M. Gruen, J. Holocek, and R. P. H. Chang, Mater. Sci. Eng., A 253, 221 (1998).