Radiation-induced degradation of polydiene sulfones as obtained by sulfur K-edge XANES

Journal of Synchrotron Radiation

Volumn 6, Issue 3, 1999, Pages 588-590

  Modrow, Hartwig ^a,b   Calderon, Gina ^a   Daly, William H ^a   De Souza, G G B ^c   Tittsworth, Roland C ^a   Moelders, Nicholas ^a   Schilling, Paul J ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

^b UNIVERSITY OF BONN   (Germany)

^c FEDERAL UNIVERSITY OF RIO DE JANEIRO   (Brazil)

Author keywords

Poly(butene 1 sulfone); Poly(hexadiene 1,3 sulfone); Resist; Sulfur; X ray lithography; XANES

Indexed keywords

EID: 0033423804     PISSN: 09090495     EISSN: None     Source Type: Journal    
DOI: 10.1107/S0909049598014782     Document Type: Article

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