X-ray emission study of ion beam mixed Cu/Al films on polyimide

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 2, 1999, Pages 593-596

  Kurmaev, E Z ^a   Zatsepin, D A ^a   Winarski, R P ^b   Stadler, S ^b   Ederer, D L ^b   Moewes, A ^c   Fedorenko, V V ^a   Shamin, S N ^a   Galakhov, V R ^a   Chang, G S ^d   Whang, C N ^d  

^a INSTITUTE OF METAL PHYSICS   (Russian Federation)

^b Tulane University   (United States)

^c LOUISIANA STATE UNIVERSITY   (United States)

^d Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033423036     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581623     Document Type: Article

References (17)

1. N. J. Chou, D. W. Dong, K. Kim, and A. C. Liu, J. Electrochem. Soc. 131, 2335 (1984).
2. A. A. Galuska, J. Vac. Sci. Technol. B 8, 482 (1990).
3. C.-A. Chang, J. E. E. Balgin, A. G. Schrott, and K. C. Lin, Appl. Phys. Lett. 51, 103 (1987).
4. K. S. Kim, I. S. Choi, Y. S. Lee, Y. W. Kim, and C. N. Whang, Nucl. Instrum. Methods Phys. Res. B 80/81, 1300 (1993).
5. G. S. Chang, S. M. Jung, Y. S. Lee, I. S. Choi, C. N. Whang, J. J. Woo, and Y. P. Lee, J. Appl. Phys. 81, 135 (1997).
6. J. J. Jia et al., Rev. Sci. Instrum. 66, 1394 (1995).
7. E. Z. Kurmaev, S. N. Shamin, K. M. Kolobova, and S. V. Shulepov, Carbon 24, 249 (1986).
8. E. Z. Kurmaev and S. N. Shamin, Surf. Coat. Technol. 47, 628 (1991).
9. E. Z. Kurmaev and S. N. Shamin, Physica C 195, 352 (1992).
10. S. N. Shamin, J. C. Pivin, and E. Z. Kurmaev, J. Appl. Phys. 73, 4605 (1993).
11. S. M. Butorin, V. R. Galakhov, E. Z. Kurmaev, and V. I. Glazyrina, Solid State Commun. 81, 1003 (1992).
12. J. E. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985), p. 232.
13. P. Skytt, J. Guo, N. Wassdahl, J. Nordgren, Y. Luo, and H. Agren, Phys. Rev. A 52, 3572 (1995).
14. R. Winiarski, D. L. Ederer, J.-C-Pivin, E. Z. Kurmaev, S. N. Shamin, A. Moewes, G. S. Chang, and C. N. Whang, Nucl. Instrum. Methods B (in press).
15. R. P. Winarski, D. L. Ederer, E. Z. Kurmaev, S. N. Shamin, K. Endo, T. Ida, A. Moewes, G. S. Chang, M. S. Kim, and C. N. Whang (to be published).
16. G. S. Chang, T. G. Kim, K. H. Chae, C. N. Whang, D. A. Zatsepin, E. Z. Kurmaev, H. S. Choe, and Y. P. Lee, J. Korean Vac. Soc. 6, 122 (1997).
17. E. Khor and L. T. Taylor, in Polyimides, Synthesis, Characterization and Applications, edited by K. L. Mittal (Pergamon, New York, 1984), p. 507.