Recommended practices for measuring the performance and characteristics of closed-loop gaseous helium cryopumps

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 3081-3095

  Welch, Kimo M ^a   Andeen, Bruce ^b   De Rijke, Johan E ^c   Foster, Christopher A ^d   Hablanian, Marsbed H ^e   Longsworth, Ralph C ^f   Millikin Jr , William E ^g   Sasaki, Y Tito ^h   Tzemos, Constantinos ⁱ  

^a CTI Cryogenics ^*

^b CTI Cryogenics   (United States)

^c Vacuum Technical Services   (United States)

^d Cryogenics Applications F Inc   (United States)

^e VARIAN MEDICAL SYSTEMS   (United States)

^f APD Cryogenics Inc   (United States)

^g Balzers   (United States)

^h Quantum Mechanics Corp   (United States)

ⁱ CVI Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033414560     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582023     Document Type: Article

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