Cost-effective PVD coatings in batch systems

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 705-710

  Engers, B ^a   Bauer, H U ^b  

^a An Der Liethe 5 39418   (Germany)

^b NONE

Author keywords

Cost effective coatings; Deposition systems; PVD plants

Indexed keywords

COATING PROCESS; COATING TECHNOLOGY; GAS; PROCESS OPTIMIZATION; PUMP DESIGN;

COST EFFECTIVENESS; PROCESS CONTROL;

BATCH SYSTEMS; PHYSICAL VAPOR DEPOSITION (PVD);

VAPOR DEPOSITION;

BATCH PROCESS; COATING; COST; PLASMA TREATMENT; VAPOR DEPOSITION;

EID: 0033391955     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00119-X     Document Type: Conference Paper

References (5)

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5. Redhead P.A., Hobson J.P., Kornelsen E.V. The Physical Basis of Ultrahigh Vacuum. 1968;Chapman and Hall, London.