Extraction of wafer-level defect density distributions to improve yield prediction

IEEE Transactions on Semiconductor Manufacturing

Volumn 12, Issue 2, 1999, Pages 175-183

  Hess, Christopher ^a,b   Weiland, Larg H ^a,b  

^a IEEE

^b PDF SOLUTIONS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INSPECTION; PROCESS CONTROL; SEMICONDUCTOR DEVICE STRUCTURES; SILICON WAFERS; YIELD STRESS;

CHECKERBOARD TEST STRUCTURE; DEFECT DENSITY DISTRIBUTIONS; MICRO DENSITY DISTRIBUTION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033366371     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.762875     Document Type: Article

References (13)

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