Wave effects in Si-micromachined multilayer guiding structures operating at W-band

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 1999, Pages 61-64

  Herrick, Katherine J ^a   Henderson, Rashaunda M ^a   Katehi, Linda P B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; COMPUTER SIMULATION; ELECTRIC LINES; ELECTRONICS PACKAGING; MICROMACHINING; MICROWAVES; SEMICONDUCTING SILICON; WAVEGUIDES;

AIR DIELECTRIC INTERFACE; CONDUCTOR PLANES; FINITE GROUND COPLANAR LINES; MULTILAYER INTEGRATION; PARASITIC COUPLING;

RADIOWAVE PROPAGATION EFFECTS;

EID: 0033366286     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)