Efficiency increase for laser structuring using mask projection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3618, Issue , 1999, Pages 403-412

  Jasper, Knut ^a   Berger, Peter ^a   Huegel, Helmut ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

IRRADIATION; LASER ABLATION; LASER BEAMS; MASKS; MIRRORS; OPTICAL INSTRUMENT LENSES; OPTICAL RESOLVING POWER; POLYIMIDES; REFLECTION;

HOMOGENEITY; HOMOGENIZER; LASER STRUCTURING; MASK BASED STRUCTURING; MASK PROJECTION;

EXCIMER LASERS;

EID: 0033365857     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)