Advances in pulsed laser deposition growth of nitride thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3618, Issue , 1999, Pages 475-486

  Fernandez, Felix E ^a   Pumarol, Manuel ^a   Martinez, Antonio ^a   Jia, Weiyi ^a   Wang, Yanyung ^a   Rodriguez, Edgardo ^a   Mourad, Houssam A ^a  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC BEAMS; CRYSTAL STRUCTURE; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR BEAM EPITAXY; NITRIDES; SEMICONDUCTING FILMS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR DOPING; STOICHIOMETRY; SUBSTRATES; TEMPERATURE;

ATOMIC NITROGEN; LUMINESCENCE SPECTROSCOPY; PULSED LASER DEPOSITION; REACTIVE NITROGEN;

PULSED LASER APPLICATIONS;

EID: 0033362709     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)