High-accuracy micromachining of ceramics by frequency-tripled Nd:YAG-lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3618, Issue , 1999, Pages 348-356

  Hellrung, Dirk ^a   Yeh, Li Ya ^a   Depiereux, Frank ^a   Gillner, Arnold ^a   Poprawe, Reinhart ^a  

^a FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMONDS; HARDNESS; LASER ABLATION; LASER BEAM CUTTING; MICROMACHINING; MICROSTRUCTURE; SAPPHIRE; SILICON NITRIDE; SURFACE ROUGHNESS; THERMAL CONDUCTIVITY OF SOLIDS; ZIRCONIA;

CHEMICAL RESISTANCES; NONCONDUCTIVITY;

NEODYMIUM LASERS;

EID: 0033362705     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)