Control charts for random and fixed components of variation in the case of fixed wafer locations and measurement positions

IEEE Transactions on Semiconductor Manufacturing

Volumn 12, Issue 2, 1999, Pages 214-228

  Kim, Kil Soo ^a   Yum, Bong Jin ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; NUMERICAL ANALYSIS; QUALITY CONTROL; RANDOM ERRORS; SEMICONDUCTOR DEVICE MODELS; STATISTICAL PROCESS CONTROL; THICKNESS MEASUREMENT;

CONTROL CHARTS; FIXED WAFER LOCATION; PROCESS MONITORING; WAFER GRINDING;

SILICON WAFERS;

EID: 0033362063     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.762880     Document Type: Article

References (9)

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