EUV spectroscopy of ultrafast capillary discharges

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3767, Issue , 1999, Pages 45-49

  Knight, L ^a   Turley, S ^a   Crawford, C ^a   Hullinger, D ^a   Shevelko, A ^a   Yakushev, O ^a   Miller, R ^a  

^a BRIGHAM YOUNG UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC DISCHARGES; PLASMA APPLICATIONS; ULTRAFAST PHENOMENA; ULTRAVIOLET SPECTROSCOPY; X RAY LITHOGRAPHY;

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY; SOFT X RAY SOURCES; ULTRAFAST CAPILLARY DISCHARGES;

X RAY PRODUCTION;

EID: 0033361213     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)