W-band amplifier fabricated by optical stepper lithography

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 1999, Pages 689-692

  Werthof, A ^a   Grave, T ^a   Kellner, W ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH ELECTRON MOBILITY TRANSISTORS; INTEGRATED CIRCUIT MANUFACTURE; LITHOGRAPHY; MILLIMETER WAVE DEVICES; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; SPURIOUS SIGNAL NOISE;

GAIN COMPRESSION; MILLIMETER WAVE INTEGRATED CIRCUITS; OPTICAL STEPPER LITHOGRAPHY; POWER DENSITY;

AMPLIFIERS (ELECTRONIC);

EID: 0033360150     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)