Silicon deposition on mullite ceramic substrates for thin-film solar cells

Progress in Photovoltaics: Research and Applications

Volumn 7, Issue 6, 1999, Pages 437-447

  Bourdais, S ^a,c   Mazel, F ^b   Fantozzi, G ^b   Slaoui, A ^a  

^a Faculté de Médecine   (France)

^b UNIVERSITÉ DE LYON   (France)

^c CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILM DEVICES;

MULLITE CERAMICS; RAPID THERMAL CHEMICAL VAPOR DEPOSITION (RT-CVD);

SOLAR CELLS;

EID: 0033358347     PISSN: 10627995     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-159X(199911/12)7:6<437::AID-PIP284>3.0.CO;2-6     Document Type: Article

References (28)

1. C. Hebling, S. W. Glunz, J. O. Schumacher and J. Knobloch, 'High efficiency (19.0%) silicon thin-film solar cells with interdigitated emitter and base front contacts', Proc. 14th European Photovoltaic Solar Energy Conference, Barcelona, Spain, 1997, p. 2318.
2. T. Y. Hsieh, K. H. Yung, D. L. Kwong and S. K. Lee, 'Silicon homoepitaxy by rapid thermal processing chemical vapor deposition (RTPCVD) - A review', Journal of the Electrochemical Society, 138(4), 1188 (1991).
3. G. Beaucarne, J. Poortmans, M. Caymax, J. Nijs and R. Mertens, 'Tailored Si-Layers on silicon oxide obtained by thermal CVD', Proc. 14th European Photovoltaic Solar Energy Conference, Barcelona, Spain, 1997, p. 1007.
4. 4 by RTCVD', Proc. 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, Austria, 1998, p. 1740.
5. G. Beaucarne, J. Poortmans, M. Caymax, K. Said, J. Nijs, D. Angermeier, S. Bourdais, R. Monna and A. Slaoui, 'Recrystallization-free thin-film crystalline silicon solar cells on foreign substrates', Proc. 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, Austria, 1998, p. 1814.
6. T. Warabisako and T. Saitoh, 'Fabrication and characterization of thin-film silicon solar cells on alumina ceramic', IEEE Transactions on Electronic Devices, 24(4), 446 (1997).
7. K. Ishii, H. Nishikawa, T. Takahashi and Y. Hayashi, 'Sub-5 μm thin film crystalline silicon solar cell on alumina ceramic substrates', Japanese Journal of Applied Physics, 32, L770 (1993).
8. C. Hebling, S. Reber, K. Scmidt, R. Ludeman and F. Lutz, 'Oriented recrystallisation of silicon layers for silicon thin-film solar cells', Proc. 26th IEEE Photovoltaic Specialists Conference, Anaheim, USA, 1997, p. 623.
9. J. A. Rand, J. E. Cotter, C. J. Thomas, A. E. Ingram, Y. B. Bai, T. R. Ruffins and A. M. Barnett, 'Silicon on graphite cloth', Proc. 1st World Conference on Photovoltaic Energy Conversion, Hawaii, 1994, p. 1262.
10. R. Auer, J. Zettner, J. Krinke, G. Polisski, T. Hierl, R. Hezel, M. Schulz, H. P. Strunk, F. Koch, D. Nickl and H. V. Campe, 'Improved performance of thin-film silicon solar cells on graphite substrates', 26th IEEE PVSC, Anaheim, USA, 1997, p. 739.
11. J. A. Rand, J. E. Cotter, A. E. Ingram, T. R. Ruffins, K. P. Shreve, R. B. Hall and A. M. Barnett, 'Monolithycally integrated silicon-film photovoltaic modules', 23rd IEEE PVSC, Louisville, 1993, p. 214.
12. H. Takato, T. Sekisawa and R. Shimokawa, 'Fabrication of integrated silicon-on-insulator solar cells', Proc. 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, Austria, 1998, p. 1810.
13. B. G. Koepke, J. D. Sibold, M. H. Leipold, J. D. Heaps, B. L. Grung and J. D. Zook, 'Low cost silicon-on-ceramic photovoltaic solar cells', Proc. 4th CIMTEC, St Vincent, USA, 1980, p. 1146.
14. H. Schneider, K. Okada and J. A. Pask, Mullite and Mullite Ceramics Applications, Wiley & Sons, Chichester, 1994.
15. C. Fiori and G. De Portu, 'Tape casting: A technique for preparing and studying new materials', British Ceramic Proceedings, 38, 213 (1986).
16. D. Angermeier, 'Dépôt et germination de silicium polycristallin sur substrats étrangers par le procédé CVD assisté par lampes halogènes (RT-CVD). Applications au photovoltaïque', PhD thesis Strasbourg, (1999).
17. M. A. Green, 'Silicon Solor Cells, Advanced Principles & Practice', Appendix D: 'Optical properties of silicon at 300K', Centre for Photovoltaic Devices, UNSW, Australia, 1995.
18. H. Schneider, M. Schmücker, K. Ikeda and W. A. Kaysser, 'Optically translucent mullite ceramics', Journal of the American Ceramic Society, 76, 2912 (1993).
19. R. Shimokawa, K. Ishii and T. Takahashi, Japanese Journal of Applied Physics, 35, 3445 (1996).
20. M. Tazawa, K. Yoshimura, K. Igarashi and S. Tanemura, 'Optical properties of alumina ceramics as a substrate of thin film solar cells', Solar Energy Materials and Solar Cells, 48, 315 (1997).
21. R Brendel , Sunrays 1.1 software, distributed by Garching Innovation GmbH, Germany, 1994.
22. R. Monna, A. Slaoui, A. Lachiq and J. C. Müller, 'Silicon thin films obtained by rapid thermal atmospheric pressure chemical vapour deposition', Journal of Materials Science and Engineering B, 39, 48 (1996).
23. G. W. Cullen, 'The preparation and properties of chemically vapor deposited silicon on sapphire and spinel', Journal of Crystal Growth, 9, 107 (1971).
24. G. E. Gottlieb, 'The epitaxial growth and properties of p-type silicon on spinel using a dual-rate technique', Journal of Crystal Growth, 12, 237 (1972).
25. D. Angermeier, S. Bourdais, A. Slaoui, J. C. Müller, G. Beaucarne and J. Poortmans, 'Thin polysilicon films on mullite substrates for photovoltaic cell application', Proc. 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, Austria, 1998, p. 1178.
26. S. A. Edminston, A. B. Sprool, M. A. Green and S. R. Wenham, 'Modelling of thin-film crystalline silicon parallel multijunction solar cells', Progress in Photovoltaics: Research and Applications, 3, 333 (1995).
27. D. P. Joshi and D. P. Bhatt, 'Grain boundary barrier heights and recombination velocities in polysilicon under optical illumination', Solar Energy Materials and Solar Cells, 22, 137 (1991).
28. M. P. Godlewski, C. R. Baraona and H. W. Brandhorst, 'Low-high junction theory applied to solar cells', Solar Cells, 29, 131-150 (1990).