Investigation on the surface characteristics of GaAs after sulfuric-vapor treatment

Thin Solid Films

Volumn 355, Issue , 1999, Pages 423-429

  Kim, Ji Wan ^a   Kang, Min Gu ^a   Park, Hyung Ho ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; BONDING; HYDRANTS; INTERFACES (MATERIALS); MORPHOLOGY; OXIDATION; POLYSULFIDES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

SULFURIC-VAPOR TREATMENT;

THIN FILMS;

EID: 0033358345     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00547-7     Document Type: Article

References (19)

1. Sandroff C.J., Nottenburg R.N., Bischoff J.-C., Bhat R. Appl. Phys. Lett. 51:1987;33.
2. Sugahara H., Oshima M., Oigawa H., Nannichi Y. J. Vac. Sci. Technol. A. 11:1993;52.
3. Carpenter M.S., Melloch M.R., Dungan T.E. Appl. Phys. Lett. 53:1988;66.
4. Ohno T. Surf. Sci. 255:1991;229.
5. Lee J.L., Kim D., Maeng S.J., Park H.H., Kang J.Y., Lee Y.T. J. Appl. Phys. 73:1993;3539.
6. Scimeca T., Watanabe Y., Maeda F., Berrigan R., Oshima M. Appl. Phys. Lett. 58:1991;1167.
7. Massies J., Dezaly F., Linh N.T. J. Vac. Sci. Technol. 17:1980;1134.
8. So B.K.L., Kwok R.W.M., Jin G., et al. J. Vac. Sci. Technol. A. 14:1996;935.
9. Sa S.H., Kang M.G., Park H.H., Suh K.S. Surf. Coat. Technol. 100/101:1998;234.
10. Spicer W.E., Pianetta P., Lindau I., Chye P.W. J. Vac. Sci. Technol. 14:1977;885.
11. Kim J.W., Kang M.G., Park H.H. J. Kor. Phys. Soc. 35:1999;s152.
12. Yuan Z.L., Ding X.M., Hu H.T., et al. Appl. Phys. Lett. 71:1997;3081.
13. Lu Z.H., Graham M.J., Feng X.H., Yang B.X. Appl. Phys. Lett. 62:1993;2932.
14. Park D.W., Chun S.W., Jang J.Y., et al. Catalysis Today. 44:1998;73.
15. Kwok,W R.W.M., Lau M., Landheer D., Ingrey S. J. Vac. Sci. Technol. A. 11:1993;990.
16. Chasse T., Peisert H., Streubel P., Szargan R. Surf. Sci. 331-333:1995;434.
17. Kwok R.W.M., Lau W.M. J. Vac. Sci. Technol. A. 10:1992;2515.
18. Geib K.M., Shin J., Wilmsen C.W. J. Vac. Sci. Technol. B. 8:1990;838.
19. Conrad S., Mullins D.R., Xin Q.-S., Zhu X.Y. Surf. Sci. 382:1997;79.