Simulation of plasma-immersed implantation of trenches

Proceedings of the International Conference on Ion Implantation Technology

Volumn 2, Issue , 1999, Pages 1187-1190

  Paulus, M ^a   Rauschenbach, B ^a   Stals, L ^a   Ruede, U ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COMPUTER SIMULATION; MATHEMATICAL MODELS; PLASMA SHEATHS;

PLASMA IMMERSION ION IMPLANTATION (PIII);

ION IMPLANTATION;

EID: 0033357601     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)