Selective ion formation in a multi-cusp sputtering source

Proceedings of the International Conference on Ion Implantation Technology

Volumn 1, Issue , 1999, Pages 338-341

  Ramos, Henry J ^a   Kasuya, Toshiro ^a   Oomori, Hirotaka ^a   Wada, Motoi ^a  

^a UNIVERSITY OF THE PHILIPPINES   (Philippines)

Author keywords

[No Author keywords available]

Indexed keywords

ION SOURCES; NEGATIVE IONS; SPUTTERING; SYNTHESIS (CHEMICAL); TARGETS;

MULTI-CUSP SPUTTERING SOURCE; SELECTIVE ION FORMATION;

ION IMPLANTATION;

EID: 0033356891     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)