Precise detection of short-circuit defects on TFT substrate by infrared image matching

Systems and Computers in Japan

Volumn 30, Issue 12, 1999, Pages 72-84

  Maeda, Shunji ^a   Ono, Makoto ^a   Kubota, Hitoshi ^a   Nakatani, Mitsuo ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED IMAGING; LIQUID CRYSTAL DISPLAYS; SHORT CIRCUIT CURRENTS;

INFRARED IMAGE MATCHING;

THIN FILM TRANSISTORS;

EID: 0033356676     PISSN: 08821666     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1520-684X(19991115)30:12<72::AID-SCJ8>3.0.CO;2-P     Document Type: Article

References (9)

1. Morimoto H, Tanaka H. Development trend of fabrication process and fabrication devices for AMLCD. J TV Soc 1993;47:565-569.
2. Kido T. In-process function inspection of active matrix panel LCD panel. J TV Soc 1993;47:643-648.
3. Henly FJ, Addiego G. In-line functional inspection and repair methodology during LCD panel fabrication. SID 91 Digest, p 686-688.
4. Wisnieff RL, Jenkins L, Polastre RJ, Troutman RR. In-process testing of thin-film transistor arrays. SID 90 Digest, p 190-193.
5. Hall HP, Pilotte PR. Testing TFT-LCD substrates with a transfer admittance method. SID 91 Digest, p 682-685.
6. Ono M, Maeda S, Kubota H, Nakatani M. Short defect detection by heat tracking using infrared image. Proc Spr Natl Conv Soc Prec Mach 1994. p 39-40.
7. Maeda S, Ono M, Kubota H, Nakatani M. High-precision short-circuit defect position detection on TFT substrate by infrared image matching. Proc Spr Natl Conv Soc Prec Mach 1994. p 41-42.
8. Kimata M, Tsubouchi N. Invisible ray camera; infrared camera. J TV Soc 1992;46:559-564.
9. Hiroi T, Maeda S, Kubota H, Watanabe K, Nakagawa Y. Precise visual inspection for LSI wafer patterns using subpixel image alignment. IEEE Computer Society, Proc Second IEEE Workshop on Applications of Computer Vision, 1994. p 26-34.