Nanometre scale island-type texture with controllable height and area ratio formed by ion-beam etching on hard-disk head sliders

Nanotechnology

Volumn 10, Issue 4, 1999, Pages 363-372

  Zhou, Lin ^a   Kato, Koji ^a   Umehara, Noritsugu ^a   Miyake, Yoshihiko ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; ION BEAM LITHOGRAPHY; MAGNETIC HEADS; NANOTECHNOLOGY; STICTION; SURFACE STRUCTURE; TEXTURES;

HARD-DISK HEAD SLIDERS; ION-BEAM ETCHING;

HARD DISK STORAGE;

EID: 0033356370     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/10/4/301     Document Type: Article

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