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Volumn 3875, Issue , 1999, Pages 155-163
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Deformation and stress in PMMA during hard X-ray exposure for deep lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPACTION;
CRACKS;
CROSSLINKING;
DEGASSING;
EXPANSION;
MICROMACHINING;
PLASTIC DEFORMATION;
POLYMETHYL METHACRYLATES;
SHRINKAGE;
STRESSES;
SYNCHROTRON RADIATION;
DEEP X RAY LITHOGRAPHY;
POLYMER MATRIX;
PROFILOMETRY MEASUREMENTS;
X RAY LITHOGRAPHY;
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EID: 0033356220
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (7)
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References (9)
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