Defect depth profiling of CdZnTe using high-energy diffraction measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3768, Issue , 1999, Pages 108-114

  Goorsky, M S ^a   Yoon, H ^a   Ohler, M ^a   Liss, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; SEMICONDUCTING CADMIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SYNCHROTRON RADIATION; X RAY CRYSTALLOGRAPHY;

CADMIUM ZINC TELLURIDE; DEPTH PROFILING; SEMICONDUCTOR DETECTORS;

RADIATION DETECTORS;

EID: 0033354803     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.366574     Document Type: Conference Paper

References (7)