Fabrication technique for high aspect ratio gratings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3879, Issue , 1999, Pages 71-78

  Kley, E Bernhard ^a   Fuchs, H Joerg ^a   Zoellner, Karsten ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; DIELECTRIC PROPERTIES; FUSED SILICA; LIGHT POLARIZATION; OPTICAL COATINGS; REACTIVE ION ETCHING;

CHROMIUM COATING; ELECTRON BEAM WRITING; HIGH ASPECT RATIO GRATINGS; ION BEAM ETCHING; OPTICAL PARAMETERS; PHASE RETARDATION; ZERO ORDER DIELECTRIC GRATINGS;

DIFFRACTION GRATINGS;

EID: 0033354572     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)