Micro assembly and micro bonding in Nano Manufacturing World

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3834, Issue , 1999, Pages 132-140

  Tsuchiya, Kensuke ^a   Murakami, Akihiro ^a   Fortmann, Gustavo ^a   Nakao, Masayuki ^a   Hatamura, Yotaro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; ELECTRIC CHARGE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR LASERS; SOLDERING;

MICROASSEMBLY; MICROBONDING;

NANOTECHNOLOGY;

EID: 0033353381     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)