Fabrication of multilevel silicon diffractive lenses for terahertz frequencies

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3879, Issue , 1999, Pages 79-87

  Walsby, E D ^a   Cheung, R ^a   Blaikie, R J ^a   Cumming, D R S ^a  

^a UNIVERSITY OF CANTERBURY   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; DEPOSITION; DRY ETCHING; FREQUENCIES; LENSES; LITHOGRAPHY; MICROMACHINING; PHOTORESISTS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON;

BINARY OPTICS; TERAHERTZ;

DIFFRACTIVE OPTICS;

EID: 0033352976     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)