High-resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3897, Issue , 1999, Pages 239-252

  De Wolf, Ingrid ^a   Chen, Jian ^a   Rasras, Mahmoud ^a   van Spengen, W Merlijn ^a   Simons, Veerle ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON; SOLDERING; STRESS ANALYSIS; TEMPERATURE MEASUREMENT; TRANSISTORS;

MICRO RAMAN SPECTROSCOPY;

RAMAN SPECTROSCOPY;

EID: 0033352891     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)