Effect of film composition on the orientation of (Ba,Sr)TiO3 grains in (Ba,Sr)TiC2+y thin films

Journal of Materials Research

Volumn 14, Issue 12, 1999, Pages 4657-4666

  Kaiser, Debra L ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; BARIUM TITANATE; COMPOSITION EFFECTS; COMPRESSIVE STRESS; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; FERROELECTRIC MATERIALS; MAGNESIA; METALLORGANIC CHEMICAL VAPOR DEPOSITION; STRAIN; STRONTIUM COMPOUNDS; THIN FILMS;

BARIUM STRONTIUM TITANATE; COMPRESSIVE STRAIN;

DIELECTRIC FILMS;

EID: 0033350783     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0630     Document Type: Article

References (40)

1. J.F. Scott, Ferroelectrics 183, 51 (1996).
2. J.F. Scott, Ferroelectr. Rev. 1, 1 (1998).
3. A.M. Glass, Science 235, 1003 (1987).
4. R.L. Holman, L.M. Althouse Johnson, and O.P. Skinner, Opt. Eng. 26, 134 (1987).
5. C.J. Johnson, Appl. Phys. Lett. 7, 221 (1965).
6. F. Jona and G. Shirane, Ferroelectric Crystals (Dover Publications, New York, 1993), p. 112.
7. K. lijima, T. Terashima, K. Yamamoto, K. Hirata, and Y. Bando, Appl. Phys. Lett. 56, 527 (1990).
8. H. Nakazawa, H. Yamane, and T. Mirai, Jpn. J. Appl. Phys. 30, 2200 (1991).
9. L.A. Wills, B.W. Wessels, D.S. Richeson, and T.J. Marks, Appl. Phys. Lett. 60, 41 (1992).
10. C.S. Chern, J. Zhao, L. Luo, P. Lu, Y.Q. Li, P. Norris, B. Kear, F. Cosandey, C.J. Maggiore, B. Gallois, and B.J. Wilkens, Appl. Phys. Lett. 60, 1144(1992).
11. P.C. Van Buskirk, G.T. Stauf, R. Gardiner, P.S. Kirlin, B. Bihari, and J. Kumar, in Ferroelectric Thin Films HI, edited by B.A. Tuttle, E.R. Myers, S.B. Desu, and P.K. Larsen (Mater. Res. Soc. Symp. Proc. 310, Pittsburgh, PA, 1993), pp. 119-124.
12. D.L.Kaiser, M.D. Vaudin, L.D. Rotter, Z.L.Wang, J.P. Cline, C.S. Hwang, R.B. Marinenko, and J.G. Gillen, Appl. Phys. Lett. 66, 2801 (1995).
13. V. Srikant, E.J. Tarsa, D.R. Clarke, and J.S. Speck, J. Appl. Phys. 77, 1517 (1995).
14. O. Fujimoto, Y. Kobayashi, and K. Kubota, Thin Solid Films 169, 249 (1989).
15. M.G.Norton, C. Scarfone, J.Li, C.B. Carter, and J.W. Mayer, J. Mater. Res. 6, 2022 (1991).
16. R.A. McKee, F.J. Walker, J.R. Conner, E.D. Specht, and D.E. Zelmon, Appl. Phys. Lett. 59, 782 (1991).
17. K. Nashimoto, D.K. Fork, and T. Geballe, Appl. Phys. Lett. 60, 1199(1992).
18. R.A.McKee, F.J. Walker, E.D.Specht, G.E. Jellison, L.A. Boatner, and J.H. Harding, Phys. Rev. Lett. 72, 2741 (1994).
19. K. Watanabe, M. Tanaka, E. Sumitomo, K. Katori, H. Yagi, and J.F. Scott, Appl. Phys. Lett. 73, 126 (1998).
20. D.L. Kaiser, M.D. Vaudin, G. Gillen, C-S. Hwang, L.H. Robins, and L.D. Rotter, J. Cryst. Growth 137, 136 (1994).
21. F.Wagner, Strem Chemicals, Inc., Newburyport, MA (private communication).
22. R.A. Waldo, in Microbeam Analysis-1988, edited by D.E. Newbury (San Francisco Press, San Francisco, CA, 1988), pp. 310314.
23. L.H. Robins, E.N. Farabaugh, and A. Feldman, Diamond Films Technol. 5, 199 (1995).
24. M. McQuarrie, J. Am. Ceram. Soc. 38, 444 (1955).
25. R.S. Roth, C.J. Rawn, G.G. Lindsay, and W. Wong-Ng, J. Solid State Chem. 104, 99 (1993).
26. C.S. Hwang, M.D. Vaudin, and G.T. Stauf, J. Mater. Res. 10, 2885 (1995).
27. JCPDS Powder Diffraction File, International Center for Diffraction Data, card file numbers 5-626 (tetragonal BaTiO3), 21-1272 (TiO2, anatase), 4-829 (cubic MgO), 35-734 (cubic SrTiO3), 221054 [Ba(OH)2] (Newtown Square, PA, 1996).
28. C.D. Theis, J. Yeh, D.O. Schlom, M.E. Havvley, and G.W. Brown, Thin Solid Films, 325, 107 (1998).
29. C.D. Theis, J. Yeh, D.O. Schlom, M.E. Hawley, G.W. Brown, J.C. Jiang, and X.Q. Pan, Appl. Phys. Lett. 72, 2817 (1998).
30. E.M. Levin, C.R. Robbins, and H.F. McMurdie, Phase Diagrams for Ceramists (The American Ceramic Society, Columbus, OH, 1974), p. 195.
31. A.D. Polli, F.F. Lange, and G.G. Levi, J. Am. Ceram. Soc. (in press).
32. S. Shirasaki, Solid State Commun. 9, 1217 (1971).
33. A.L. Roytburd, J. Appl. Phys. 83, 228 (1998).
34. G.A. Smolenskii and K.I. Rozgachev, Zh. Tekh. Fiz. 24, 1751 (1954).
35. S.P. Alpay and A.L. Roytburd, J. Appl. Phys. 83, 4714 (1998).
36. J.S. Speck and W. Pompe, J. Appl. Phys. 76, 466 (1994).
37. Y.S. Touloukian, R.K. Kirby, R.E. Taylor, and T.Y.R. Lee, Thermal Expansion: Nonmetallic Solids (IFI/PIenum Data Co., New York, 1977), pp. 288, 554, 570.
38. N.P. Bansal and R.H. Doremus, Handbook of Glass Properties (Academic Press, Inc., New York, 1986), p. 175.
39. J.F. Scott and C.A. Paz de Araujo, Science 246, 1400 (1989).
40. H.E. Kay and P. Vousden, Philos. Mag. 40, 1019 (1949).