Microhotplate gas sensor arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3857, Issue , 1999, Pages 38-49

  Cavicchi, R E ^a   Semancik, S ^a   Walton, R M ^a   Panchapakesan, B ^a   DeVoe, D L ^a   Aquino Class, M ^a   Allen, J D ^a   Suehle, J S ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON MONOXIDE; CHEMICAL VAPOR DEPOSITION; DESORPTION; GAS ADSORPTION; MICROMACHINING; MICROSENSORS; REACTION KINETICS; TIN COMPOUNDS;

MICROHOTPLATE GAS SENSORS; TIN OXIDE;

CHEMICAL SENSORS;

EID: 0033350220     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)