Control of an integrated bake/chill system

Proceedings of the IEEE Conference on Decision and Control

Volumn 4, Issue , 1999, Pages 4198-4203

  Loh, A P ^a   Huang, A ^a   Tan, W W ^a   Lim, K W ^a   Ho, W K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; HEAT FLUX; HEAT LOSSES; LITHOGRAPHY; SILICON WAFERS; SURFACES; TEMPERATURE;

INTEGRAL CONTROLLER; INTEGRATED BAKE SYSTEM; UNIFORM SPATIAL DISTRIBUTION;

TEMPERATURE CONTROL;

EID: 0033349799     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)