Beam line architecture of the VIISta 810 medium current ion implanter

Proceedings of the International Conference on Ion Implantation Technology

Volumn 1, Issue , 1999, Pages 162-165

  Renau, Anthony ^a  

^a VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ION BEAMS; PARTICLE OPTICS;

ION IMPLANTERS;

ION IMPLANTATION;

EID: 0033349641     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)